Sample Preparation
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- Clean Room
- Even if you go in and out with plain clothes and the cleanliness drops, it is an excellent one with specifications that reach class 10 or higher cleanliness in 1 hour.
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- HEX Series
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The HEX system is modular thin film deposition system including:
·Sample preparation for surface analysis
·Sputtering
·Thermal evaporation
·Pulsed laser
·Organic physical vapour deposition
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- Compact ECR Ion Shower System
- Etching/sputtering
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- Tabletop Maskless Aligner
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Patterning continuous structures consisting of curved lines - where smooth contours are required.
Min. resolution of 0.6 µm.
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- Furnaces
- Box Furnace (1000℃), TSILICONIT Furnace (1500℃), Gas Flow Furnace (900℃)
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- Equipments from other groups
- ·Floating-Zone Furnace
- ·IR Furnace
Measurement system
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- Cryogen-Free Magnet (8T)
- Lowest temperature 2K.
Equipped with superconducting shim coils, the uniformity of the magnetic field can be increased to 10-7.
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- NMR Spectrometer System
- Broadband: 1-800MHz
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- NMR Spectrometer System
- Broadband: 1-400MHz
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- NMR Spectrometer System
- Broadband: 1M-400MHz
- Broadband: 3-125MHz
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- RF Amplifiers
- Broadband: 40k-3MHz, 200-400MHz
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- Hand-made NMR Probes
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- Superconducting Magnet (9T)
- JEOL NMR system
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- Oscilloscope
- Broadband: up to 4GHz
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- Network Analyzer
- Broadband: 100kHz-14GHz
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- Signal Analyzer
- Braodband: 9kHz-3GHz
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- Signal Analyzer
- Broadband: 26.5GHz
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- ESR Measurement System
- Electromagnet: up to 1.2T
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- Electromagnet
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- Magnetic Shield Room
- Electromagnetic shield performance (30MHz-3GHz): -40dB. Attenuates the geomagnetic field to 100 nT order.
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- Barnett Effect Measurement System
- It is placed in a double magnetic shield box and installed in the magnetic shield room. The measurement is performed in an environment where the geomagnetic field is suppressed to about several nT.
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- Low temperature Barnett effect measurement system
- The only device in the world that can measure the temperature dependence of the Barnett effect from 100K to room temperature.
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- Einstein-de Haas Effect Measurement System
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- Prober (Lq. N2)
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- Other equipments
- Multimeter, source meter, nanovolt meter, thermometer (Cryocon, Lake Shore), 3-axis magnetic sensor, accelerometer, etc.
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- Equipments from other groups
- ·PPMS (QD)
- ·XRD
Misc
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- Micromanipulator
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- Helium Leak Detector
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- Machine Tools
- 3D printer, CNC milling cutter, 5-axis CNC milling cutter etc.
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- Polishing Machine/Refine Saw
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- Computer
- Parallel computer cluster for MPI/OpenMP hybrid parallel computing