Thermal CVD
Asahi rica (Thermal furnace)
Fujikin & Alicat (Softoware & MFC)
Infrared heated CVD
ULVAC (Imfrared gold image furnace)
Fujikin & Alicat (Softoware & MFC)
Vacuum evaporation system
Vacuum device (VE-2030)
Suppter・
dopping system
Rdec
Soft plazma
etching system
Meiwafosis (SEDE-GE)
Quadrupole mass spectrometer
Home made & Rdec : 4 systems
Gas chromatograph
(Barrier discharge ionization detector)
SHIMAZU (GC-2030), (equipped with manual gas sampler)
Gas chromatograph
(Thermal conductivity detector)
SHIMAZU (GC-2014AT) (equipped with manual gas sampler)
Fourier transform infrared spectroscopy
JASCO (FT/IR-4XST) (equipped with ATR flow-cell)
Microscopic Raman spectrometer
Thermo Fisher Scientific (DXR-Raman Microscope), 532nm
Microscopic Raman spectrometer
Renishow (inViaQontor‐GY), 532nm, Raman mapping(LiveTrack)
Ultra high vacumm
STM(UHV-STM)
JEOL (equipped with ion-gun, evaporation source, heating system and LEED)
Electrochemical
STM(EC-STM)
Agilent (5500)
Potentiostat
Meiden hokuto (HZ-7000(HAG1232mP)), BAS (ALSモデル7081A), BAS (RRDE-3A Rotating ring disk electrode system) : 5 units